MetOne 3400系列專用高壓氣體擴(kuò)散器(減壓閥)
高壓氣體經(jīng)過 Diffuser (30~150 Psi) 調(diào)整至常壓狀態(tài)后再經(jīng)由顆粒計數(shù)器讀出目前氣體中粒子分布情形 ,可量測范圍0.1um-5um。應(yīng)用于半導(dǎo)體廠、光電廠中高壓氣體如PN2、O2、H2、CDA等。
高壓氣體經(jīng)過 Diffuser (30~150 Psi) 調(diào)整至常壓狀態(tài)后再經(jīng)由顆粒計數(shù)器讀出目前氣體中粒子分布情形 ,可量測范圍0.1um-5um。應(yīng)用于半導(dǎo)體廠、光電廠中高壓氣體如PN2、O2、H2、CDA等。
Specifications
Specifications are subject to change without notice.
Specification | Details | |
Dimensions (L x D) | 19.1 x 5.7 cm (7.5 x 2.25 in.) | |
Material | Nickel-plated aluminum and stainless steel | |
Weight | 0.57 kg (1.25 lb) | |
Pressure range | 0.1 CFM, 1.0 CFM or 50 LPM diffuser: 206–1034 kPa (30–150 psig) 100 LPM diffuser: 344–1034 kPa (50–150 psig) | |
Flow rate | 0.1 CFM, 1.0 CFM, 50 LPM or 100 LPM | |
Sample gas | Dry, inert and non-toxic | |
Inlet connector | Stainless #4 VCR fitting (modified) | |
Outlet connector |
| |
Orifice material | Sapphire (at the inlet end) | |
Exhaust port | ?-in. NPT |