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名稱:基于機器視覺的BGA連接器焊球檢測
摘要：文章提出了一種基于機器視覺的BGA器件焊球質(zhì)量檢測方法。該方法在同一視點下，用相同光源分別以兩種不同入射方向角照射被測BGA連接器焊球，獲得兩幅圖像，然后得到BGA連接器焊球在X方向的曲面信息，以此計算出被測焊球的主要質(zhì)量參數(shù)。zui后給出了BGA連接器焊球檢測的主要算法。
1引言
BGA（Ball Crid Array）是近幾年發(fā)展起來的一種電子器件封裝技術(shù)，非常適用于大規(guī)模集成電路的封裝，其發(fā)展十分迅速。BGA連接器和BGA封裝器件現(xiàn)已被廣泛應(yīng)用，幾乎所有的計算機、等電子產(chǎn)品中都能找到BGA封裝器件。圖1是BGA連接器的BGA焊接面。
BGA連接器以焊球作為與印刷電路板連接的引腳。安裝時，加熱BGA連接器，使焊球直接熔接在印刷電路板上，就可完成BGA連接器的安裝過程。與其他類型的連接器相比，BGA連接器具有安裝方便，工作可靠，封裝密度高，易于裝配，體積小，自感和互感小等優(yōu)點。它特別適用于計算機CPU等超大規(guī)模集成電路芯片封裝或用作IC器件的連接插座。圖2是BGA連接器安裝后的側(cè)視圖。
由圖2可知，BGA連接器的制造精度要求很高，尤其是對BGA焊球的機械尺寸精度要求非常高。BGA連接器上的焊球高度差應(yīng)小于0.2毫米，否則就會造成BGA連接器上的某個或某些焊球無法與電路板正常熔接，從而使得整個電路產(chǎn)品報廢。圖3是BGA焊球高度不一致造成的電路連接故障的示意圖。
為了避免BGA連接器的連接故障，通常要在生產(chǎn)流水線上逐一對BGA連接器焊球質(zhì)量進行檢測（主要檢測參數(shù)為焊球的直徑、高度）。若采用傳統(tǒng)的接觸式測量方法，不但測量周期較長，而且無法滿足在生產(chǎn)線現(xiàn)場對連接器上每一個焊球在線檢測的要求。
將機器視覺應(yīng)于BGA連接器焊球的質(zhì)量檢測，則可實現(xiàn)無損非接觸在線檢測。由于機器視覺采用圖像采集和圖像處理的方法，可在一次采樣過程中獲取被測BGA連接器的整個圖像，因此它的整個檢測周期非常短，并且能將BGA連接器上的所有焊球一次檢測完成。顯然，它是一種較為理想的BGA連接器質(zhì)量檢測方法。
2檢測原理
采用機器視覺方法檢測BGA連接器焊球的直徑、高度等參數(shù)，先由圖像采集裝置獲取BGA連接器焊球端面的圖像，該圖像如圖（所示。然后設(shè)法從該圖像提取BGA連接器焊球的曲面信息，zui后由曲面信息求得被測焊球的直徑、高度等參數(shù)。
焊球圖像生成過程如圖4所示。光源照射到焊球表面點S，其反射光經(jīng)透鏡中心投射在圖像面的點S‘上。當(dāng)光源為平行光，反射光呈均勻散亂分布，且焊球的投影為近似平面投影時，圖像面點S‘的灰度值I與照明方向角（Α，Β）和焊球表面點S的狀態(tài)有關(guān)。其函數(shù)關(guān)系可表示為：
I（X,Y,Α，Β）=A＊Ρ（X,Y）＊G（P,Q,Α，Β）I（X,Y,Α，Β）是與點S對應(yīng)的圖像面上點S‘的灰度值，可從圖像采集裝置直接得到；同時，它也是以光投影方向角（Α，Β）為參數(shù)的關(guān)于物體表面點S（X，Y）的函數(shù)。A為常數(shù)。Ρ（X，Y）為點S（X，Y）處的表面反射率，它與點S（X，Y）的表面性質(zhì)有關(guān)，如表面有污點或有花紋等都會影響反射率，且不同的位置有不同的Ρ（X，Y）。G為入射光在物體表面的密度，當(dāng)光投影方向角（Α，Β）確定后，它與點S（X，Y）的表面斜率有關(guān)。
由上述分析可知：在圖像面生成的圖像帶有被側(cè)物體的三維信息P、Ρ。檢測到點S的灰度值后，只要根據(jù)點S的坐標(biāo)X、Y值和入射光方向角（Α，Β），設(shè)法從式（1）或式（2）提取P、Ρ，就可得到焊球表面的斜率，然后由點S的斜率計算出被測焊球的直徑、高度。但是，式（1）中的表面反射率Ρ（X，Y）較為復(fù)雜，不同的物體有不同的表面反射率，同一物體的不同位置的表面反射率也不盡相同，而且在連續(xù)工業(yè)生產(chǎn)環(huán)境下，不可能得到準(zhǔn)確的被測物體表面反射率Ρ（X，Y）。因此，直接應(yīng)用式（1）無法由灰度值I計算出點S的斜率。
表面反射率Ρ（X，Y）雖然復(fù)雜，但是它僅與點S的表面性質(zhì)有關(guān)，而與照明條件無關(guān)。這里利用表面反射率Ρ（X，Y）的這一特性，在同一視點下，用同一光源分別以兩種不同入射方向角，照射BGA連接器的焊球，用圖像采集裝置在圖像面的點S‘處獲得相應(yīng)的兩個灰度值I1和I2。由于I1和I2是圖像面上點S‘在不同照明條件下的灰度值，對應(yīng)于BGA連接器焊球上的同一點S，具有相同的平面坐標(biāo)X、Y和表面反射率Ρ（X，Y）。求解下列聯(lián)立方程：在同一視點下，用相同光源分別以兩種不同入射方向角照射被測BGA連接器焊球；在圖像面，用圖像采集裝置獲取相應(yīng)的兩幅BGA連接器圖像；然后，逐一將兩幅圖像對應(yīng)點的兩灰度值和入射光源方向角代入式（5），求出BGA連接器各點的P值，并將求得的P值存于一兩維數(shù)組中，并使該數(shù)組的下標(biāo)與圖像的X、Y坐標(biāo)對應(yīng)，從而將BGA連接器的灰度圖像轉(zhuǎn)換成BGA連接器的表面斜率圖像（沿X方向）；zui后由BGA連接器的表面斜率圖像提取BGA連接器的表面斜率信息，計算出BGA焊球的直徑、高度。把上述測量過程稱之為“兩次投影”。
由于目標(biāo)是檢測BGA焊球的高度、直徑，在獲得BGA連接器的表面斜率圖像（沿X方向）后，沿X方向找出所有斜率P變化的*值和極小值，然后根據(jù)相鄰極值在X方向和Y方向的距離就可方便地計算出BGA焊球的直徑、高度。相鄰極值在X方向和Y方向的距離可由圖像采集裝置的像素間距和保存P值的兩維數(shù)組下標(biāo)求得。圖5是當(dāng)Y坐標(biāo)為某一值時，得到的BGA焊球曲面信息。
3主要檢測算法
通過圖像采集裝置，在同一視點的圖像面獲取兩M×N像素的圖像，分別保存于Image1[M,N]和Image2[M,N]兩數(shù)組中。下列算法計算圖像面上每一像素對應(yīng)的被測BGA連接器表面X軸方向的斜率。計算結(jié)果存于一M×N數(shù)組中。
檢測算法：
4運行結(jié)果
該BGA連接器焊球檢測裝置采用768X590像素的面陣式CCD攝像頭，NI-1907圖像捕捉卡，LED平面光源和P4-1.7G計算機。該裝置用于檢測200個焊球的BGA連接器（40X40mm），檢測參數(shù)為焊球高度和直徑。它的檢測周期小于800ms，檢測精度可達到2%，具有檢測速度快，工作可靠等特點

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Fanuc Servo Amplifier A06B-6058-H331?_A20B-1003-086?1/01A_A16B-110?0-0330/04B

GE Fanuc A16B-2201-0311 PC Power Supply NEW!

Fanuc Circuit Board A16B-1210-0070?/08F_A16B12100?07008F_A320-12?10-T076/04

Fanuc PCB A16B-1211-0870?/04B _ A16B-1211-0870 04B

Fanuc A16B-1211-0091

Fanuc A16B-1211-0062?/10R Circuit Board #7229

Fanuc Power Input Unit A14B-0076-B355?_A14B0076B355_?A16B-1310-0660?/02A

GE Fanuc A16B-2200-0090?/07A Axis Control Board

FANUC A16B-2200-0754 USPP A16B22000754

FANUC A16B-3200-0040 /03C , tested, warranty

GE Fanuc BOARD A16B-2200-0842?/08F A16B-2200-0842 NEW

GE FANUC A16B-1200-0800?/08A A16B-1200-0800 /10B A16B-1200-0800?/09B

FANUC MAIN BOARD A16B-2200-0841 with modules TESTED WARRANTY

FANUC A16-B-2200-085?3 with 10 modules TESTED WARRANTY

GE FANUC A16B-2200-0800?/08B A16B-2200-0800 PCB

FANUC A16B-1211-0340 USPP A16B12110340

A16B-1210-0030?/06F FANUC

A16B-1210-0030 FANUC

FANUC A16B22010103 **NIB**

Fanuc A16B-2201-0800?/03B Vision Engine PCB A16B22010800

FANUC SERVO AMPLIFIER A06B-6057-H004 A16B-1200-0670?/04A TOYODA 32163

FANUC SERVO AMPLIFIER A06B-6057-H004 A16B-1200-0670?/04A TOYODA 32163

FANUC SERVO AMPLIFIER A06B-6057-H004 A16B-1200-0670?/04A TOYODA 32163 B

FANUC A16B-1210-0210 USPP A16B12100210

Fanuc A16B-2200-0390 PCB, SERIALFEEDBK AX CONT.S0C

FANUC A16B-1310-0530 NSPP A16B13100530

Fanuc A16B-2200-0250

FANUC A16B-2201-0880 USPP A16B22010880

GE FANUC A16B-2201-0310?/06C A16B22010310 Sub Board

FANUC 18-iMA A16B-3200-0350 DATA SERVER BOARD

FANUC 5/6 AXIS CIRCUIT BOARD A16B-2200-0800 07B PCB

FANUC A16B-1010-0150?/06A MOTHER BOARD W/ A16B-1210-0510?-01 POWER UNIT

Fanuc A16B-2200-0124?/11C Board - Used

FANUC A16B-1110-0450 USPP A16B11100450

A16B-2200-0113?/09B FANUC

Fanuc A16B-1210-0110

GE FANUC A16B-1211-0042?/02A

FANUC A16B-1200-0610 USPP A16B12000610

Fanuc A16B-2200-0855

FANUC A16B-2200-0090

Fanuc Servo Drive Amplifier A06B-6058-H225 A16B-1200-0800?/10B A20B-1003-0275?/04A

Fanuc Servo Drive Amplifier A06B-6058-H225 _ A16B-1200-0800?/10B _ F07 02886-B

FANUC A16B-2200-0471 USPP A16B22000471

Fanuc A16B-1200-0410

FANUC ROBOTICS AXIS CONTROL PCB BOARD A16B-2200-0853?/03B *NEW*

FANUC A16B-2203-0190 NSPP A16B22030190

FANUC A16B-2200-0120 USPP A16B22000120

Fanuc A16B-1211-0781

FANUC A16B-1200-0310 USPP A16B12000310

FANUC A16B-2200-0690

FANUC A16B-1211-0610?/01A USPP A16B1211061001?A

Fanuc A16B-1211-0030

FANUC A16B-1211-0930 USPP A16B12110930

Fanuc A16B-2200-0090?/06A A16B-2200-009 PC Board - Used

FANUC A16B-1212-0540 NSPP A16B12120540

Fanuc A16B-2200-0310

FANUC A16B-1210-0940 USPP A16B12100940

FANUC A16B-1211-0920 USPP A16B12110920

FANUC A16B-2200-0391 USPP A16B22000391

FANUC A16B-1212-0900?/02A *NICE*

FANUC A16B-1200-0440?/01A A16B1200044001?A PC BOARD

FANUC A16B-2201-0311?/04B *NEW*

FANUC A16B-2200-0701 NEW A16B22000701

FANUC A16B-1200-0800 USED A16B12000800

Fanuc A16B-1000-0030?/01A Mother Board

FANUC A16B-2200-091 *NEW*

FANUC A16B-2200-0113?/09B PMC RAM BOARD *NEW*

FANUC A16B-2200-0912 *NEW*

Fanuc PC Board F12 A16B-1200-0030?/01A A16B12000030/0?1A

Fanuc A16B-3200-0450?/07G

FANUC A16B-2200-0853

NEW FANUC POWER SUPPLY ( A16B-1212-0901 )

FANUC PCB F16M/T ( A16B-2200-0915 ) WITH DAUGHTER CARDS

FANUC PCB F16M/T ( A16B-2200-0942 ) WITH DAUGHTER CARDS

FANUC A16B-2200-0800?/09B SERIAL 5/6 AXTS *USED* 

RECONDITIONED FANUC SPINDLE BOARD ( A16B-2100-0070 )

A16B-1010-0050?/16C Fanuc

Fanuc Board # A16B-2200-008 Clean!

FANUC CNC BOARD A16B-0160-0210 

FANUC CNC BOARD A16B-0160-0270?/06B A16B-0160-0270

FANUC OPERATOR PANEL A02B-0092-C141 A16B-1310-0380 AH30-V0226 A02B0092C141 *M*

PC BOARD PROCESS I/O /FANUC/A16B-22?00-0782/03A - USED

Enlarge
Fanuc Motherboard Baseboard A16B-1000-0010?/08F _ A320-1000-T016 parts or repair

Fanuc spindle orient board type A16B-0440-02A

GE FANUC M-NET BOARD A16B-2201-0771?/02A A16B-2201-0771

FANUC A16B-3200-0070?/02A *NICE*

Fanuc Axis Card A16B-1200-0350?, tested, warranty

NEW OEM GE Fanuc Servo Amplifier Top Board A16B 1100 0330 /04B T334/03 FREE SHIP

FANUC A16B-2200-0524 USED PC BOARD A16B22000524

FANUC A16B-2200-0020?/07C USED A16B22000020

FANUC A16B-2200-0027?0/05B USED A16B22000270

FANUC A16B-2200-0690?/10B REMAN. PC BOARD A16B22000690

FANUC A16B-1212-0531?/A02B-2000-060?0

RECONDITIONED FANUC Axes Control A16B-2200-0091 )

RECONDITIONED FANUC Base 2 ( A16B-2200-0021 )

Fanuc Servo Amplifier A06B-6058-H223 A16B-1200-0800?? A20B-1003-0273?? REPAIRED 

Fanuc A06B-6058-H007 Servo Amplifier Drive Unit A16B-1100-0300 /02 GE 40A Amp 40

FANUC MOTHERBOARD MAIN CONTROLLER A16B-1000-0140?/07A CNC ELOX CEF-50 CEF50

FANUC A16B-1212-0216 MEM A4 A16B-1212-021 MEMORY A16B12120216 A16B2201-0101

FANUC SERVO AMPLIFIER A06B-6058-H222 A16B-1200-0800?/0 STAR RNC-16 P.1

FANUC A16B-0190-0061?/26K BOARD A16B0190006126?K AMADA DEGA 304040

FANUC BOARD A16B-2200-0220 /03A A16B121202220 03A

NEW FANUC A16B22010890 PC BOARD ROBOT R-J ETHERNET A B

FANUC A16B-1200-0550?/0,A320-1200?-T552/03 BOARD

FANUC A16B-1010-0150 /07A MOTHERBOARD GOOD TAKEOUT

Fanuc A16B-1210-0030 Axis PC Control Board #7355

GE Fanuc A16B-2200-0092?/07B Axis Control Board

FANUC RELAY UNIT A04B-0216-C413 A16B-1200-0770 0780

Fanuc PC Board - A16B-2200-0120

FANUC MOTHERBOARD CONTROLLER A16B-1000-0140?/07A A320-1000-T144?/03 FANUC MISC P12

Fanuc Power Supply Unit A16B-2203-0370?/07C

Fanuc Devicenet A16B-2203-0190?/03A - NEW

GMF FANUC A16B12110860 MEMORY MODULE SHARED RAM BOARD

GMF FANUC A16B12110090 MEMORY BUBBLE

FANUC A16B-2200-0360?/04B BOARD

BRAND NEW SEALED FANUC A16B-1212-0100 PSU BRAND NEW

FANUC A16B-2200-0390 3-4 AXES PC BOARD A16B22000390 A16B2200039 A16B-2200-039

Fanuc Board A16B-2201-0792?/?03C A16B22010792 03C

FANUC RAM BOARD (SHARED) A16B-1211-0860

FANUC A16B-2203-0370 /13E POWER SUPPLY (NEW!!)

FANUC A20B-2000-0220 /05B SPINDLE DRIVE BOARD A16B-2201-0440 /07B GOOD TAKEOUT

FANUC A16B-2200-0310 USPP A16B22000310

FANUC A16B-2200-0310?/03A USPP A16B2200031003?A

Fanuc PCB Board M# A16B-1211-0062?/10B ~NEW SURPLUS~

FANUC A16B-3200-0040 , tested, warranty

FANUC A16B-2202-0181 POWER SUPPLY BOARD ***RFB***

GE FANUC A16B-3200-0070?/03A A16B-3200-0070 LR MATE

NIB GE Fanuc P BASE A16B-2200-0020?/02B A16B22000020

GE FANUC A16B-2202-0400?/0 A16B-2202-0400 

GE FANUC A16B-1211-0040?/07A A16B-1211-0040

GE FANUC A16B-1310-0331?/02A A16B-1310-0331 BOARD

GE Fanuc BOARD A16B-1211-0062?/10B A16B-1211-0062

FANUC A16B-1211-0091 , tested warranty

FANUC A16B-1211-0750 PC BOARD I/O tested warranty

Fanuc A16B-2203-011 Free Ship

GE Fanuc A16B-2201-0101 (real object photos) Free Ship

FANUC A16B-1211-0940 PCB I/O

FANUC A16-B-2200-084?2 with 6 modules TESTED WARRANTY

FANUC A16-B-2200-085?3 with 8 modules TESTED WARRANTY

GE Fanuc A16B-1210-0030?/06F A16B-1210-0030 

OFFER & WIN FANUC A16B-1010-0050?/16C BOARD

Fanuc A16B-1211-0970

FANUC BOARD A16B-0190-0061 A16B 0190 0061 A16B01900061

FANUC BOARD A16B-0190-0061 A16B 0190 0061 26K A16B01900061

GE FANUC A16B-2203-0292?/01A A16B-2203-0292 ETHER ER1T

Fanuc A16B-2200-0251?/05C A16B-2200-0251 AXIS CONTROL

FANUC A16B-2201-0120 BOARD

GE FANUC A16B-2200-0240?/02A A16B-2200-0240 MMC I/K

FANUC A16B-2202-0540 Free Ship

FANUC A16B-1010-0041 07B MASTER PC BOARD REPAIRED & TESTED 30 DAY WARRANTY

FANUC A16B-2200-0152 06A CONV. CPU PC BOARD REPAIRED & TESTED 30 DAY WARRANTY

Fanuc A16B-3200-0070?/03A A16B32000070

Fanuc A16B-1212-0900?/02A A16B-1212-0900

FANUC A16B-3200-0056 USPP A16B32000056

Fanuc A16B-1212-0871 16 Series Power Supply Unit

FANUC AC Spindle Servo Unit A06B-6059-H003 A06B6059H003 board a16b-1100-0240

new FANUC A16B-1211-0520?/0 RAM MEMORY MODULE BOARD A16B-1211-052

FANUC A16B-1212-0220 USPP A16B12120220

Fanuc Power Supply A16B-1212-0871

NEW FANUC A16B-1212-0531 / 06B404953 POWER SUPPLY UNIT

GE FANUC A16B-2201-0792?/03C A16B-2201-0792 VISION CPU 

FANUC A16B-1211-0860 NSFP A16B12110860

FANUC A16B-1211-0031 / 02A AXIS PCB, NNB

Fanuc A16B-1210-0070?/02B A16B1210007002?B Main Buffer Board - Used

Fanuc A16B-2300-0020?/03B PC Board *NEW OLD STOCK*

NEW FANUC A16B-2201-0791 A16B22010791 Vision Processor

A16B-121-0300/?06A FANUC

FANUC ROBOTICS AXIS CONTROL PCB BOARD A16B-2200-0855?/04B *NEW*

Fanuc A16B-3200-0040

Fanuc A16B-2200-0842?/08F

FANUC A16B-1212-0300 USPP A16B12120300

FANUC A16B-2200-0221 USPP A16B22000221

FANUC A16B-1200-0450 USPP A16B12000450

GE FANUC BOARD A16B-2200-0250 NEW

Fanuc Axis Control Board A16B-2200-0252?/06C

FANUC A16B-1210-0471 USPP A16B12100471

FANUC A16B-1310-0530 USPP A16B13100530

Fanuc A16B-1210-0230

GE Fanuc Axes Control Board M# A16B-2200-0093 ~NIB SUR~

FANUC A16B-1310-0131 USPP A16B13100131

GE FANUC BOARD A16B-1210-0300?/02A A16B-1210-0300

GE Fanuc A16B-2200-0821?/04B A16B-2200-0821 ETHERNET

Fanuc RJ / PCB Ethernet Option Board A16B-2200-0821

Fanuc RF CIM Board A16B-1210-0300

FANUC A16B-1210-0430 USPP A16B12100430

A16B-1310-0010 FANUC

Fanuc A16B-1310-0010?-01 A16B1310001001 Power Unit PX 60117 - Used

Fanuc A16B-2200-0360 Card for 4 axis.

Enlarge
FANUC A16B-2200-0251 PC BOARD A16B22000251

FANUC A16B-3200-0220

GE Fanuc BOARD A16B-2200-0854?/05B A16B-2200-0854 NEW

Fanuc Sub CPU Board A16B-2200-032-?08B

FANUC BOARD A16B-2200-0842?/08F

Fanuc Circuit Board A16B-2200-030 #31825

Fanuc Axis Control A16B-2200-0690 09B _ A16B22000690

Fanuc 3-Axes Control A16B-2200-0251?/05C A16B22000251/0?5

Fanuc A16B-1210-0230?/01A PCB-AEC board NEW

Fanuc A16B-1300-0020?01A A16B-1300-0020?/01A Board

(1) Fanuc RC Master PCB Board A16B-1000-0140

Fanuc A16B-1210-0230 Circuit Board #7356

FANUC A16B-1000-0030 / 02B MOTHER BOARD A16B10000030 FANUC GN6 P.1 

A16B-1000-0030?/06C A320-1000-T034?-03 FANUC MOTHER BOARD LEHMANN TL-15S CNC

CNC MOTHERBOARD MOTHER BOARD A16B-1000-0030?/02B A320-1000-T034 FANUC STRIPPIT 

HITACHI H-CUT EDM 304S FANUC MOTHER BOARD A16B-1000-0030?/06C A320-1000-T034?/03

HITACHI SEIKI MACC MATIC CNC FANUC MOTHER BOARD A16B-1000-0030?/05C A16B10000030

Ge FANUC BOARD A16B-1210-0230?/01A A16B-1210-0230

A16B-1310-0530 FANUC

Fanuc A16B-2200-032 Sub CPU A16B2200032 (A16B-2200-032?0/06A) A16B22000320/0?6A
Returns: Accepted
FANUC A16B-1212-0910 USPP A16B12120910

FANUC A16B12130161 **NIB**

FANUC A16B-2200-0760 NSFP A16B22000760

FANUC A16B-1212-0221 USPP A16B12120221

1 FANUC A16B-1210-0950 CIRCUIT BOARD Q9-4

FANUC A16B-1211-0092 / 05C BOARD A16B12110092 GAMA PALLET 

FANUC A16B-1211-0092?/050 ROBOTICS BOARD, NIB

FANUC A16B-1310-0600 USPP A16B13100600

Fanuc Board A16B-2201-0311?/04B A16B2201031104?B NIB!

Fanuc PCB A16B-2201-0570?/02B Guaranteed to work 

FANUC A16B-1210-0660 USPP A16B12100660

A16B-2200-0141?/16E FANUC

FANUC A16B-2203-0291 USPP A16B22030291

GE FANUC BOARD A16B-2200-0200?/03A A16B-2200-0200

Fanuc A16B-1200-0680

FANUC A16B-3200-0042 /02A A16B32000042 CPU Board

FANUC A16B-1210-0481 USPP A16B12100481

Fanuc Main CPU Board A16B-2200-0200?/03A

Fanuc RH Shared Ram (memory) Board A16B-1211-0860

Fanuc RF Axis CPU Board A16B-1210-0020

A16B-1210-0200?/02B FANUC

Fanuc RF RAM Board (192 KB max.) A16B-1210-0270

FANUC A16B-3200-0462?/08 NSPP A16B3200046208

FANUC A16B-2200-0782 NSPP A16B22000782

FANUC A16B-0160-0543

FANUC A16B-3200-0070?/03A *NICE*

Fanuc Circuit Breaker A20B-2200-0010?/02A_3 Repairs/Revisi?ons_A16B-3200-?0056/01A

FANUC A16B-1212-0871?/ A20B-8001-0290

FANUC A16B-1200-0800?/09B PC BOARD A16B1200080009?B

FANUC A16B-2200-0852 *RECONDITIONED?*

GE Fanuc A16B-1212-0540 PCB Emergency Stop Brake NEW

Fanuc A16B-1212-0100?-01 Power Unit

FANUC A16B-2200-0800?/08B *USED*

Fanuc PCB Axes Control A16B-2200-0093?/06A A16B22000093

Fanuc A16B-2200-022 Control Board

Fanuc Circuit Board PCB A16B-2200-0093 06A A16B22000093 _ A320-2200-T096 04

Fanuc Board A16B-0190-0010

Fanuc A16B-1000-0140?/04A, A16B-1000-0140?, Backplane

Fanuc Axis control 4axis board A16B-2200-0250?/06C

Fanuc A16B-1211-0272?/04B Axes Control PCB A1 6B-1 211-0272/04B

Fanuc A06B-6057-H004 Servo Amplifier A16B-1200-0670?/06A

RECONDITIONED FANUC OPTION 2 BOARD LOADED ( A16B-2200-0930 )

FANUC A16B-1212-0730 /A16B-1600-052?0

Fanuc A16B-3200-0040?/08D, CPU PCB - NEW

Fanuc A16B-2200-0524?/07A Base 0 P44 PC Board 

Fanuc A16B-2200-0090?/07A Axis Control Board 

Fanuc Power Supply DC R-J2 Type A16B-1212-0871 (3824) 

G.E. FANUC EMG-CONT. BOARD CAT#A16B-1212-?0540

FANUC SERVO AMPLIFIER A06B-6058-H221 A16B-1200-0800?/06A STAR RNC-16 P.1

Fanuc A16B-2200-002 Axis Control Board

** NEW ** FANUC A16B-1100-0330 THREE AXIS AMPLIFIER TOP BOARD **NEW NO BOX**

FANUC CARD A16B-2200-0450?/03B W/ A16B-1600-0400?/01A

GMF FANUC A16B12110030 CPU CARD FOR ROBOTICS

FANUC A16B-0160-0651 USPP A16B01600651

FANUC A16B-3200-0040 /04C6 , 

Fanuc A16B-2200-0780

VERY NICE GE GENERAL ELECTRIC FANUC 4TH AXIS CONTROL BOARD R-H A16B-2200-025

FANUC A16B-3200-0462?/08B SERVO AMPLIFIER CONTROL BOARD ***NIB***

Fanuc Devicenet I/F PCB A16B-2203-0190?/03A NEW

FANUC( A06B, A16B, A20B): Servo Amplifier Module A06B-6093-H102?. NEW!

FANUC A16B-2200-039 Free Ship

FANUC A16-B-2200-085?4 with 6 modules TESTED WARRANTY

FANUC BOARD A16B-1010-0040 A16B 1010 0040 04C A16B10100040

GE Fanuc A16B-2203-0190?/06B A16B-2203-0190 MOTHERBOARD

GE Fanuc A16B-2203-0190?/03A A16B-2203-0190 MOTHERBOARD

Fanuc A16B-1000-003 Master Board

GE FANUC A16B-2200-0300?/06A A16B-2200-0300 AXIS & WELD

GE FANUC A02B-0094-C107 A16B-1212-0300 A20B-1003-0630

Fanuc Circuit Board A16B-3200-0300?/06C 900051 _ 06C900051 _A16B320003000?6C900051

FANUC A16B-2200-0341 CIRCUIT BOARD New 

Fanuc A16B-2001-0890 Free Ship

Fanuc PC Servo Control Board A16B-2202-0820?/02B (2879)

FANUC A16B-2200-0251 0 3 AXIS PC BOARD, REPAIRED & TESTED

FANUC A16B-2200-0002 BASE 2 BOARD, NIB

Fanuc A16B-1211-0302 A_Circuit Board PCB _A320-1211-T30?6/02_A16B-1211?-0302/02A

Fanuc Servo Amplifier A06B-6076-H101 A _ A16B-2100-0110 02A _ A20B-1006-0110 03A

Fanuc Circuit Board A16B-2202-0681 01A_A16B-22O2-?O681/O1A_A320-?2202-T686/01

FANUC CONTROL BOARD A16B-2200-0250?/05C A16B 2200 0250 05C A16B22000250/0?5C FANUC

FANUC A16B-2200-0842?/08F MAIN CPU PCB MODULE w/memory FANUC A16B-2200-0842

GE Fanuc PSU with HSSB A16B-1212-0871 & A20B-8001-0290

FANUC A16B-2200-0350 NSPP A16B22000350

A16B-2202-0860?/05D FANUC

A16B-2200-0141?/16 FANUC

FANUC A16B-2200-0173 USPP A16B22000173

FANUC 3000C CNC BOARD A16B- 0160- 0543

Fanuc A16B-2201-0440?/05B A16B22010440/0?5B Control Board - Used

Fanuc A16B-2200-0854?/05B A16B2200085405?B PC Board - New, No Box

FANUC A16B-2201-0580?/03C & A16B-1212-0531?/03A W/ RACK

FANUC A16B-2200-0660 USPP A16B22000660

Fanuc A16B-1210-0270

Fanuc 0 Main Board A20B-2000-0170

FANUC PCB A16B-1200-0110?/02B Circuit Board A16B12000110

FANUC PCB A16B-1200-0090?/04B Circuit Board A16B12000090

Fanuc A16B-2201-0792?/03C PC Control Board

Fanuc Base 0 Pcb A16B-2200-0120

A16B-1211-0850 Power Unit Fanuc 0/10

Ge FANUC BOARD A16B-1210-0270?/02A A16B-1210-0270

FANUC A16B-2200-0210 NSPP A16B22000210

Fanuc A16B-1212-0540

Fanuc RF Axis Control PCB Board A16B-1210-0970

GE FANUC BOARD A16B-1310-0601?/03B A16B-1310-0601 NEW

Fanuc A16B-1310-0601

FANUC A16B-2200-0020 USPP A16B22000020

FANUC A16B-1210-0380 NSPP A16B12100380

Fanuc Base 1, PMC CPU 512KB - A16B-2200-0131

Fanuc A16B-1000-0140?/07A Motherboard Main RC controller

A16B-1211-0870 FANUC

Fanuc A16B-2200-0020

FANUC A16B-2200-0524 / 11A BASE 0 PCB

FANUC CIRCUIT BOARD PCB A16B-2200-0524?/07A

FANUC A16B-1210-0800 USPP A16B12100800

FANUC A16B-1000-0030 /06C MOTHER BOARD A16B10000030 HITACHI SEIKO EDM H-CUT 3045

FANUC A16B-2201-0311 USPP A16B22010311

FANUC A16B-2201-0890 USPP A16B22010890

A16B-2201-0580 FANUC MODULE CONTROLLER *NEW*

GE FANUC BOARD A16B-2200-0855?/03B A16B-2200-0855 AXIS

Fanuc Velocity Control Unit A06B-6047-H203?_A20B-1000-022?0/07B_A16B-120?0-0230/07B

Fanuc A16B-1210-0200?/02B Control Board A16B12100200

Fanuc A16B-1211-0520?/0 Control Board A16B12110520

FANUC A16B-3200-0040 PC BOARD A16B-3200-0040?/04C

GE FANUC A16B-2200-0211?/0 A16B-2200-0211 SERIAL PORT

Fanuc Servo Amplifier Unit, # A02B-0118-B002?, A16B-1200-0880?, WARRANTY

Acroloc FANUC CNC Circuit Board #A16B-0190-001?0/37K

Fanuc Servo Amplifier A06B-6058-H223???? A16B-1200-0800?/08A _ A20B-1003-0273?/03A

Fanuc Axis Board Loaded A16B-2200-0855 A16B22000855

Fanuc Card Board A16B-1212-0910 A16B12120910

NEW FANUC A16B-2202-0890 / 02B BOARD

Fanuc Circuit Board A16B-2200-0900?/06B_A16B22000?90006B_A16B-22?OO-O9OO/O6B

Fanuc Board A16B-1211-009 Card A16B1211009 Memory Mod.

FANUC CONTROLLER CARD A16B-1211-0301

FANUC CONTROLLER CARD A16B-1211-0901

FANUC CONTROLLER CARD A16B-2100-0080

FANUC A16B-2202-0731?/04C BOARD

FANUC A16B-2200-0821 **RECONDITIONE?D**

1 FANUC A16B-2200-0853?/05B CONTROL BOARD Q10-3

Fanuc A16B-1110-0540 I/O Board

FANUC LTD OSI ETHERNET PCB A16B-2201-0560?/03B

GE FANUC A16B-1211-0030?/03A

FANUC A16B-1200-0230 USPP A16B12000230

Fanuc PCB Circuit A16B 1210 0440/05B A16B12100440/0?5B

FANUC Ad.AXS Circuit Board A16B-1210-0440 #A16B12100440

FANUC A16B-2200-0171 USPP A16B22000171

FANUC A16B-2200-016 USPP A16B2200016

Fanuc A16B-1212-0100 ELECTRIC POWER SUPPLY MODULE Free Ship 

FANUC A16B-2200-0391

A16B-2200-0141 FANUC

Fanuc CNC Servo Drive Amplifier VCU A06B-6058-H228 F12 01602-B A16B-1200-0800?/10

Fanuc A16B-1210-0940

Fanuc Circuit Board A16B-1212-090/?70_A16B1212090?70_A16B1212090?_A320-1212-T90?2/03

A16B-1210-0020?/09E FANUC

RECONDITIONED FANUC POWER SUPPLY ( A16B-1210-0660 )

FANUC A16B01900010 A16B-0190-0010 - 90 DAY WARRANTY

Fanuc Operator Panel A02B-0083-C331?_A02B0083C331 _ A16B-1310-0380?/03B

FANUC A16B-1210-0040 USPP A16B12100040

FANUC A16B-1212-0100 USPP A16B12120100

Fanuc board A16B-2201-0110 

Fanuc Board A16B-0190-0010

Fanuc RF Axis Control Board A16B-1210-0030

Fanuc OPT 2 Board A16B-2202-0850?/02A_A16B22020?85002A_A16B-22?O2-O85O/O2A

FANUC A16B-2200-0490 USPP A16B22000490

FANUC A16B-2200-0693 USPP A16B22000693

FANUC A16B-1211-0302 / 04A BOARD A16B12110302 HARTFORD SPIII CNC

Fanuc A16B-2201-0133 PCB, BUBL.MEMORY, 256BX4 

FANUC A16B-1210-0220 USPP A16B12100220

FANUC A16B-1210-0012?/02B USPP A16B1210001202?B

FANUC A16B-1211-0042 NSPP A16B12110042

Fanuc A16B-1210-0440?/05B Used AD Axis Board FREE SHIP

FANUC A16B-2200-0431?/01A & A-B 1771-RIO - 1 YEAR WARANT

Fanuc Board A16B-2201-0371?/06B A16B2201037106?B NIB!

Fanuc A16B-1212-0531?R 6 Slot Power Supply

Fanuc Board A16B-2201-0792?/03C A16B22010792/0?3C

FANUC A16B-2200-0320 PC BOARD

Fanuc A16B-1211-0040 CPU Memory Card Board

NEW GE Fanuc A16B-1212-0210 PC Memory Axis Control Board Card 0C A16B12120210 

Fanuc PC Board A16B-1211-0781?/05B In Excellent Shape !!

FANUC A16B-1212-0300 REMAN. PC BOARD A16B12120300

NEW GE FANUC A16B-2200-0854 CIRCUIT BOARD 8 AXIS CONTROL SERIAL +LT

FANUC A16B-3200-0220

FANUC A16B-2200-0524 PC BOARD A16B22000524

GE FANUC A16B-2201-008/?09B *USED*

FANUC A16B-3200-0040?/04C MAIN CPU PCB MODULE

FANUC Power Supply A16B-1211-0890

FANUC F15M/T pcb A16B-2200-0131

FANUC F15M/T pcb A16B-2200-0124

FANUC F15M/T pcb A16B-2200-0020

Fanuc Circuit Board A16B-2200-0692?/06B A16B22000692 PCB

FANUC CPU BOARD A16B-3200-0060 / 09D USED A16B32000060

Fanuc PSU PCB, A16B-1212-0471 FANUC 

Fanuc A16B-1200-0030?/01A board

FANUC CNC BOARD A16B-0190-0080

FANUC CNC BOARD A16B-0160-0540?-29G A16B-0160-0540

FANUC AXES CONTROL A16B-2200-0692?/05B A16B22000692 05B

FANUC A16B-2200-0853 *RECONDITIONED?*

FANUC A16B-1212-0100 POWER SUPPLY UNIT IN STOCK TESTED GOOD A16B12120100

FANUC A16B-0170-0460?-03A A320-0170-T462 BOARD A16B0170046003?A AMADA DEGA 304040

FANUC BOARD A320-1211-T394 A320-1211-T394 A16B-1211-0390 HITACHI SEIKI EDM #2 

Fanuc A16B-0190-0010 PCB - 3000 Control Board

FANUC BOARD A16B-2200-066 A16B 2200 066 A16B2200066

Fanuc A16B-1212-0901 Power Supply

Fanuc A16B-3200-0056 PCB Board 

Fanuc A16B-2200-0091 PCB Board 

FANUC A16B-1211-0390?/03A A16B12110390 03A

Fanuc A16B-1211-0041?/02A Circuit Board #7227

GE FANUC AXES CONTROL BOARD CAT#A16B-2200-?0090/07A

GE FANUC BASE 1 BOARD CAT#A16B-2200-?0471/12B

FANUC A16B-1212-0871?/18C 301373 POWER SUPPLY BOARD, NNB

FANUC ROBOTICS CONTROL BOARD PCB A16B-1211-0820?/04B

FANUC ROBOTICS CONTROL BOARD PCB A16B-1211-0820?/03B

GE FANUC OPTION 2 CIRCUIT BOARD PCB A16B-2202-0850 *DAUGHTER BOARDS*

GE FANUC OPTION 2 CIRCUIT BOARD PCB A16B-2202-0850 WITH CARDS

FANUC ROBOTICS ETHERNET REMOTE PCB ERIT BOARD A16B-2203-0290?/02A

FANUC A16B-1210-0810 /04A PMC-M MANUFACTURER REFURBISHE

GE FANUC BOARD A16B-2200-0780?/06C A16B-2200-0780

FANUC A16B-2200-0490?/08D PC BOARD ***RFB***

GE FANUC A16B-1300-0200?/03C A16B-1300-0200 NEW

FANUC POWER SUPPLY UNIT A16B-1212-0100

FANUC A16B-2203-0111 Free Ship

Fanuc A16B-1212-0100?-01 Free Ship

FANUC A16B-1211-0040 CPU BOARD , tested

Fanuc A16B-1210-0560 Power Unit, tested

FANUC A16B-2200-0252 PC BOARD 2 AXES CONTROL tested

FANUC A16B-1211-0040 CPU BOARD , tested warranty

FANUC A16B-1212-0730 Board TESTED WARRANTY

FANUC A16-B-2200-085?4 without modules TESTED WARRANTY

FANUC A16-B-3200-004?0 with 5 modules TESTED WARRANTY

Fanuc robot A16B-3200-0040 CPU PCB MAIN TESTED

GE FANUC A16B-2201-0391?/05D A16B-2201-0391 

GE FANUC A16B-1210-0350?/0 A16B-1210-0350 OPTION 1 NEW

GE FANUC A16B-1500-0010?/04C A16B-1500-0010 BOARD

FANUC A16B-2200-0292 A16B 2200 0292 A16B22000292 /

GE Fanuc A16B-1600-0361?/02A A16B-1600-0361 PCB

Fanuc A16B-1210-0560 Power Unit, tested, warranty

Fanuc A16B-1210-0560 Power Unit no. PX30417 , tested, warranty

Fanuc A16B-1210-0560 Power Unit

FANUC A16B-1200-0670 USPP A16B12000670

FANUC A16B-2201-0080 USPP A16B22010080

GE FANUC BOARD A16B-1210-0210?/02B A16B-1210-0210

FANUC A16B-1100-0080 06D SPINDLE PC BOARD REPAIRED & TESTED 30 DAY WARRANTY

FANUC A16B-2200-0141 CPU SUB PC BOARD

GE Fanuc Axes Control Board M# A16B-2200-0701 ~NIB SUR~

FANUC A16B-1210-0490?/02A PC BOARD MMC

FANUC POWER SUPPLY UNIT A16B-1211-0890

Fanuc A16B-2201-0891 Ethernet Remote PCB #7458

Fanuc A16B-2201-0120?/10A Board

FANUC A16B-2201-0103 USPP A16B22010103

FANUC 3000C CNC BOARD A16B- 0190- 0010

FANUC 3000C CNC BOARD A16B- 0190- 0080

FANUC ADD I/O PCB A16B-1210-0591

GE Fanuc BOARD A16B-2300-0022?/03B A16B-2300-0022 ,

A16B-220-0090/?0 FANUC

Fanuc A16B-1210-0020

Fanuc A16B-1211-0302 I/O Board A16B-1211-0302?/04A 

Fanuc A16B-1210-0510 Power Supply A16B-1210-0510?-01 A16B12100510

Fanuc A16B-1210-0560

FANUC A16B-0170-0470 NSPP A16B01700470

GE FANUC BOARD A16B-2200-0252?/05C A16B-2200-0252

FANUC A16B-1211-0041 CONTROLLER - 1 YEAR WARRANTY NEW

Fanuc Axis 2 Control Board A16B-2200-0252?/06C

1 FANUC A16B-2200-0300 WELD CARD Q9-4

NEW FANUC A16B-2203-0190?/06B PC BOARD DEVICENET MOTHERBOARD A16B22030910

Fanuc LTD A16B-1211-0040?/07A NE08129523 Board 

Fanuc LTD A16B1211-0060/?11C Board 

Fanuc LTD A16B-12110030/?03A Board 

Fanuc LTD A16B-1211-0090?/100 Board 

Fanuc Motherboard A16B-1000-0140 08B A16B1000014008?B

Fanuc Board A16B-2202-0851

FANUC BOARD A16B-0160-0470?/08F A16B 0160 0470 08F A16B01600470

FANUC BOARD A16B-0160-0470?/15G A16B 0160 0470 15G A16B01600470

FANUC A16B-2201-0391 05D BOARD A16B22010391 05D700510

GE FANUC A16B-1000-0140?/04A A16B-1000-0140 BOARD

FANUC BOARD A16B-0160-0470 A16B 0160 0470 A16B01600470

FANUC A16B-1211-0890 USPP A16B12110890

FANUC A16B-2200-0131 USPP A16B22000131

FANUC A16B-1210-0350 USPP A16B12100350

FANUC A16B-2202-0750?/06A,A320-2202?-T754/03 BOARD

FANUC A16B-0160-0470 / 220 BOARD A16B0160047022?0 AMADA DEGA 304040

FANUC A16B-0160-0470 / 22J BOARD A16B0160047022?J AMADA DEGA 304040

FANUC A16B-1210-0510 USPP A16B12100510

FANUC A16B-1211-0301 USPP A16B12110301

FANUC A16B-1000-0140?/08B *USED*

FANUC A16B-2200-0361 1/2 AXES CONTROL A16B22000361 A16B2200036 A16B-2200-036

FANUC A16B-3200-0220 PROFIBUS I POWER SUPPLY ~ NEW

Fanuc A16B-1212-0110?-01

Fanuc Circuit Board A16B-1010-0050 10A _ A16B1010005010?A _ A320-1010-T056?/04

FANUC A16B-1000-0140?/08B BOARD

FANUC A16B-1310-0380?/02B,A04B-0221?-C201,KEYBOARD FUJITSU LIMITED N860-3118-T001

FANUC A16B-2201-0311?/10D BOARD USED

FANUC A16B-1212-0871?/07A500976 USPP A16B1212087107?A5

FANUC A16B-1212-0871 USPP A16B12120871

FANUC A16B-1212-0540 USPP A16B12120540

FANUC Ad.AXS Circuit Board A16B-1210-0440 #A16B12100440

Fanuc Motherboard A16B-1000-0030?/06C_A16B10000?03006C_A320-10?00-T034/03

FANUC A16B-2200-0760 NSPP A16B22000760

FANUC 3M/T Control Board A16B-1100-0040 04B 

Enlarge
Fanuc A16B-1211-0890

Fanuc A16B-1211-0890

FANUC A16B-2200-0912?/06B *NEW*

FANUC A16B-2200-0171?/10A *NEW*

FANUC S-RAM MEMORY A16B-2201-0132 w/6M W

Fanuc Circuit Board A16B-2201-0103 USED A16B22010103

FANUC A16B-1211-0760?/04B PC BOARD A16B1211076004?B

GE Fanuc BOARD A16B-2201-0854?/03B A16B-2201-0854 OPT3

FANUC ACP PCB A16B-1210-0410

RECONDITIONED FANUC POWER SUPPLY ( A16B-1211-0890 )

FANUC A16B-2200-0956?/04A *USED*

FANUC A16B-3200-0330 USED MODULE A16B32000330

FANUC A16B-2200-0956?/08A *USED*

RECONDITIONED FANUC A16B-2201-0440

FANUC PCB A16B-1200-0100?/02B Circuit Board A16B12000100

FANUC BOARD A16B-1200-0670?-0

Fanuc Circuit Board PCB 1-4 Axes A16B-2200-039 _ A16B2200039 _ A16B-22OO-O39/?10B

GE Fanuc A16B-2201-0811?/04B PMC Card PCB control Board NEW

Fanuc Robot Controls A16B-1212-0871?/08B A16B-3200-0040

Fanuc Power Supply Board A16B-1212-0871?/18C (4552)

GE / FANUC CNC - PC CARD - A16B-1211-0060 /11C

GE / FANUC PC CARD - A16B-2200-0450?/03B A16B-1600-0400

GE Fanuc Circuit Board, # A16B-1200-0880?/01A, WARRANTY

Fanuc A16B-2202-0400?/0 OPT2 Module

NICE FANUC A16B-1100-0300?/02A SERVO AMP BOARD 

FANUC PCB F16M/T ( A16B-2200-0931 ) WITH DAUGHTER CARDS

1 FANUC A16B-1212-0730?/02B CIRCUIT BOARD 

RECONDITIONED FANUC POWER SUPPLY ( A16B-1212-0531 )

Fanuc A16B-1210-0430?-04B

GE / FANUC CNC ROBOTICS - PC CARD - A16B-1211-0030 /04A

GE / FANUC CNC ROBOTICS - PC CARD - A16B-1211-0041 /06A

FANUC 2 Axis Servo PCB A16B-1200-0800

Fanuc PCB Serial Port A16B-2200-0211?/06A In Good Shape!

FANUC A16B-1212-0540?/06D P491-RB PC BOARD ROBOT R-J EMERGENCY STOP 257 

FANUC SPINDLE BOARD ( A16B-1100-0080 )

RECONDITIONED FANUC A16B-1210-0490 PC BOARD MMC

GE Fanuc A16B-1211-0890?/10A Power Supply Unit Refurb

GE Fanuc A16B-1212-0871?/18C Power Supply Board PCB Circuit Board NEW

Fanuc A02B-0094-C108 CNC Operator A16B-1212-0301?/0 Robotic PC Board*

RECONDITIONED FANUC OPTION BOARD ( A16B-2202-0401 ) WITH DAUGHTER CARD

FANUC A16B-2200-0690 PC BOARD A16B22000690