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英國RenishawXL-80激光測量系統(tǒng)新型RenishawXL-80激光測量系統(tǒng)為坐標測量機和機床等運動系統(tǒng)提供高性能精度校準
新型Renishaw XL-80激光測量系統(tǒng)為坐標測量機和機床等運動系統(tǒng)提供高性能精度校準。 XL-80系統(tǒng)快速、精確、非常輕便,保留了Renishaw ML10在日常使用中所表現(xiàn)出的高精度、可靠性和耐用性等重要優(yōu)點。XL-80與的軟件解決方案和優(yōu)異的性能相結(jié)合,可以提高貴公司的經(jīng)營業(yè)績。 Renishaw設計、制造和供應激光系統(tǒng)已有二十多年的歷史。XL-80是這些設計和制造豐富經(jīng)驗的結(jié)晶,具有真正的系統(tǒng)性能和操作優(yōu)點。 XL-80激光和XC-80補償器體積小巧,一套完整的線性測量系統(tǒng)裝在一個“便攜箱"中,重量僅12公斤。再加一個三腳架(裝入尼龍拉鏈攜帶箱中),您就有了一個真正便攜的機器測量方案。激光和補償器均可通過USB與PC機連接,因此無需單獨的接口,也無需擔心復雜的設定。 精確穩(wěn)定的激光源和準確的環(huán)境補償,保證了±0.5 ppm的線性測量精度。讀數(shù)以50 kHZ頻率讀取,線性測量速度可達4 m/s,即使在速度下線性分辨率仍可達1 nm。所有測量選項(不僅是線性)都采用干涉儀測量,使您對記錄數(shù)據(jù)的精度有信心。 使用方便 XL-80設定和使用快速簡便,減少了等待時間,增加了用于測量的時間,同時保留了純粹干涉測量系統(tǒng)精度高的優(yōu)點。 優(yōu)質(zhì)揑設計、惂憿榓媄術巟帩惀Renishaw揑標巙惈摿惇。不管測量的是微米還是納米,的設施和質(zhì)量保證都極為重要。標準的三年保修期和支持網(wǎng)絡體現(xiàn)了我們對您的承諾。 提高機器的正常運行時間 提告機器性能 增強對機器或加工能力的了解 證明機器性能 符合質(zhì)量保證規(guī)程和標準 提供專業(yè)的維護服務 The basis of the new system is a compact laser head (XL-80) and an independent environmental compensator system (XC-80). A tripod and stage may also be required depending upon the application. Together with measurement optics and software they form a highly accurate measurement and analysis system that can be stored and transported in one of the optional custom designed storage/transport cases. The XL-80 laser produces an extremely stable laser beam, with a wavelength that is traceable back to national and international standards. All of the above features make the XL-80 quick and easy to use. In accordance with (IEC) EN60825-1, Renishaw XL-80 lasers are Class 2 lasers and safety goggles are not required. Always refer to the system manual for safety details before operating the system for the first time. The XC-80 compensator is a crucial factor in your XL system’s linear measurement accuracy. Featuring “intelligent sensors" that process the readings at source, the compensator very accurately measures air temperature, air pressure and relative humidity. Changes in these conditions can effect the wavelength of the laser light and the measurement readings taken. The XC-80 uses the sensor readings to modify the nominal value of the laser wavelength to give a true value, which is then used in calculations to virtually eliminate any measurement errors resulting from these variations. If you are interested in accuracy you NEED effective wavelength compensation. Key features of XC-80 include: Note: Environmental compensation is NOT required for angular or straightness measurements when using a Renishaw system as these are calculated from differences in two beam paths close together, where the environmental factors self cancel. As rotary axis, flatness and squareness measurements are also based on these measurements they also do not require environmental compensation. Unless you are using a dedicated measurement rig, then you are likely to need a mounting stage (and in most cases a tripod) to adjust the laser’s position relative to the desired measurement axis. All of Renishaw's experience in metrology and laser interferometry is to be found in each and every measurement system that it produces. Our aim is to deliver the specified accuracy, with full traceability and confidence that the laser system will continuously deliver that accuracy day-after-day where it counts, in the workplace. All lasers and ballbars are calibrated at the Renishaw factory against reference systems with traceability to national standards. Performance specifications are verified to international procedures against a documented system error budget, with system accuracy quoted to 95% confidence level (k = 2), which is valid across the full environmental operating range. Without reliable and accurate wavelength compensation, errors of 20 ppm - 30 ppm would be common. Great effort has been taken to ensure Renishaw’s XC-80 compensation system and sensors are accurate across the entire operating range of the system. It is this that maintains ±0.5 ppm linear measurement accuracy from 0 ºC - 40 ºC (32 ºF - 104 ºF) and over the full air pressure range. * Choose one of 12 pre-defined capture rates. Renishaw measurement optics enable you to measure linear, pitch, yaw, horizontal and vertical straightness along any axis. Additional optic kits are available to enable measurement of surface flatness and squareness of axis. The same optics can be used with XL-80 or ML10 systems, ensuring consistency of measurement set-ups and procedures. All measurements are interferometric and therefore use the traceable international standard wavelength of laser light, allowing you to have total confidence in the results. For rotary axis calibration, please see RX10 rotary axis calibration section and for other optical accessories to assist in set-up and measurement, please see the optics accessories section. Interchangeable - The unique design of linear, angular and straightness optics enables easy interchange for different measurements, without having to re-align the laser. Convenient - Moving optics have no cables to drag or snag, for best accuracy and convenience. Low mass aluminium optics - The optics are manufactured in aluminium, therefore the optics' low mass is especially relevant if measuring pitch errors on horizontal arm CMMs and for dynamic measurements. Quick acclimatisation - Some competitor systems use stainless steel optic housings. These are much heavier than Renishaw's aluminium optics and have a lower thermal conductivity, therefore taking longer to acclimatise to the shop environment. Linear measurement is by far the most common form of measurement performed on a machine. Each linear measurement optics kit contains: For linear measurements over 40 m you will require the long range linear accessory kit These optics allow angular pitch and yaw measurements to be made. Can measure maximum angular deflections of up to ±10° with resolution of 0.01 arc sec. Each angular measurement kit contains: Where: * 0.2% accuracy available by special order This optics combination kit is a cost saving alternative for users who wish to perform both linear and angular measurements. Each combination kit contains: These optics allow the measurement of horizontal straightness error in linear axes up to 4 m in length to be made. They also enable axis parallelism to be measured. Each short range straightness kit contains: ±0.5% ±0.5 ±0.15M2 µm (±0.5% ±20 ±0.5F2 µin) Where: May require Universal (straightness) shutter or straightness accessory kit, depending upon application (see optics accessories section) These optics can be used to measure the horizontal straightness error in linear axes from 1 m up to 30 m in length when using the XL-80 laser system. They also enable measurement for parallelism of axes. Each long range straightness kit contains: ±2.5% ±5 ±0.015M2 µm (±2.5% ±200 ±0.05F2 µin) Where: * subject to environmental conditions May require Universal (straightness) shutter or straightness accessory kit, depending upon application (see optics accessories section) These optics determine the out-of-squareness of two nominally orthogonal axes, by comparing their straightness slope values which are referenced via the optical square. Note: Each squareness measurement optics kit contains: Where: The flatness mirrors not only rotate horizontally, but also tilt to allow horizontal and vertical adjustment of the laser beam. Note: Each flatness measurement kit contains: ±0.6%* ±0.02M2 µm (±0.6%* ±0.08F2 µin) Where: 英國雷尼紹新型XL-80激光干涉儀 在超精密的測量和校準方面,激光干涉儀已經(jīng)扮演多年極重要的角色。但是近年來隨著自動化運動系統(tǒng)性能大幅提高,面對半導體和傳統(tǒng)金屬加工業(yè)的需求,現(xiàn)有激光系統(tǒng)的性能已無法滿足一些客戶的要求。英國Renishaw XL-80激光測量系統(tǒng)
XL-80激光干涉儀的主要優(yōu)點
便攜性和易用性 精度和動態(tài)性能 全面信心 激光校驗機器的優(yōu)點
不管使用哪種機器或運動系統(tǒng),在開始切削或加工材料或測量部件之前,您都需要知道設備運行是否正常。 您可以了解機器定位性能的每個特性隨時間發(fā)生變化的詳細情形,預測某特定機器何時需要維修并預先建立應急計劃。
通過有針對性的維護和誤差補償,Renishaw的性能測量設備可確實提升機器的性能。
使用適合工作要求的機器 — 把工作安排給能夠達到公差要求的機器,確保機器適合工作要求并且廢品率較低。
當客戶需要對您的機器質(zhì)量或工藝樹立信心時,校準曲線和定期性能評估結(jié)果將是證明。它們能夠賦予您寶貴的競爭優(yōu)勢,使您于那些沒有進行這些測試的制造商。
ISO 9000系列質(zhì)量標準要求采用的、可溯源的系統(tǒng)和方法對生產(chǎn)和檢測設備進行校準、監(jiān)視和控制。
高質(zhì)量的售后服務。在用戶現(xiàn)場使用與系統(tǒng)原始制造商在其工廠內(nèi)使用的相同校準工具進行校準,這是使機器恢復為制造商原始規(guī)格的方法。XL系統(tǒng)組件
XL-80 laser unit
XC-80 compensator and sensors
Tripod and stage
性能和測試
System performance
Linear measurement range 80 metres Linear measurement accuracy ±0.5 ppm Linear frequency accuracy (1 year) ±0.05 ppm Resolution 1 nm Maximum travel velocity 4 m/s Dynamic capture rate 10 Hz - 50 kHz * Preheat time < 6 minutes Specified accuracy temperature range 0 °C - 40 °C Storage temperature range -25 °C to +70 °C Environmental sensor performance
Sensor Range Accuracy Material temperature 0 °C - 55 °C ±0.1 °C Air temperature 0 °C - 40 °C ±0.2 °C Air pressure 650 mbar - 1150 mbar ±1 mbar Relative humidity (%) 0 - 95% non condensing ±6% RH XL-80所用的測量光學鏡組
Features and benefits
Linear measurement optics kit
Part number Description A-8003-0440 Linear measurement optics kit Specification
Standard range 0 m - 40 m (0 in - 1600 in) System accuracy (when used with XL-80 system) ±0.5 ppm (parts per million) (when used with ML10 Gold Standard) ±0.7 ppm (when used with ML10, pre-Gold Standard) ±1.1 ppm Resolution 0.001 µm (0.1 µin) Maximum velocity 4 m/s (9600 in/min) Velocity measurement accuracy ±0.05% Angular measurement optics kit
Part number Description A-8003-0441 Angular measurement optics Specification
Axial range 0 m - 15 m (0 in - 590 in) Angular measurement range ±175 mm/m (±10°) Angular accuracy ±0.6%* ±0.5 ±0.1M µ/mm
(±0.6%* ±0.1 ±0.007F arc sec) Resolution 0.1 µm/m (0.01 arc sec)
% = percentage of displayed value
M = measurement distance in metres
F = measurement distance in feetLinear and angular combination kit
Part number Description A-8003-2774 Linear and angular optics combination kit Straightness measurement optics kit: 0.1 - 4 m axis length
Part number Description A-8003-0443 Straightness optics - short range Specification
Axial range 0.1 m - 4 m (4 in - 160 in) Straightness measurement range ±2.5 mm (±0.1 in) Accuracy Resolution 0.01 µm (1 µin)
% = percentage of displayed value
M = measuring distance in metres
F = measuring distance in feetStraightness measurement optics kit: 1 - 30 m axis length
Part number Description A-8003-0444 Straightness optics - long range Specification
Axial range 1 m - 30 m (40 in - 1200 in) Straightness measurement range ±2.5 mm (± 0.1 in) Accuracy* Resolution 0.1 µm (10 µin)
% = percentage of displayed value
M = measuring distance in metres
F = measuring distance in feetSquareness measurement optics
A straightness measurement optics kit and straightness accessory kit are also required to perform squareness measurements.
Part number Description A-8003-0665 Squareness measurement optics Specification
Range ±3/M mm/m (±2000/F arc sec) Resolution 0.01 µm/m (0.01 arc sec)
M = measurement distance in metres
F = measurement distance in feetFlatness measurement kit
Angular optics are also required to perform flatness measurements.
Part number Description A-8003-0442 Flatness measurement kit Specification
Axial range 0 m - 15 m Flatness measurement range ±1.5 mm (±0.06 in) Accuracy Resolution 0.01 µm (1 µin)
% = percentage of calculated flatness
M = length of diagonal in metres
F = length of diagonal in feet
英國雷尼紹新型XL-80激光干涉儀詳細介紹:
Renishaw的新型XL-80激光干涉儀能夠滿足和超越實際工業(yè)規(guī)范水平,提供4m/s的測量速度和50kHz記錄速率。即使在的數(shù)據(jù)記錄速率下,系統(tǒng)準確性可達到±0.5ppm(線性模式)和1納米的分辨率,這些改進意味著工程師仍能使用可溯源性激光干涉的優(yōu)勢,幫助解決現(xiàn)代化機器設計問題。
系統(tǒng)精度比原有的對應產(chǎn)品ML10激光系統(tǒng)有所提升,在整個日常溫度、氣壓和濕度不同工作環(huán)境下,均可達到±0.5ppm的精度。環(huán)境讀數(shù)使用XC-80智能傳感系統(tǒng)進行讀取,每7秒更新一次激光讀數(shù)補償值。還有一點很重要,與Renishaw的ML10系統(tǒng)一樣,所有測量值均采用穩(wěn)定的氦氖激光源的波長為基準,保證能夠溯源至國際的長度標準。
此新系統(tǒng)可以與現(xiàn)有的ML10系統(tǒng)光學鏡組兼容,使目前數(shù)千ML10用戶能夠升級到新系統(tǒng),并同時保留其在光學鏡組、程序和人員培訓上的原有投資。
我們還提供已更新的Renishaw軟件版本(LaserXL?及QuickViewXL?),能夠以用戶熟悉的、易于使用的格式提供數(shù)據(jù)。LaserXL?能夠執(zhí)行循序漸進式的測量,以方便對大多數(shù)機床按標準進行檢驗,QuickViewXL?軟件能夠在屏幕上實時地顯示激光讀數(shù)。
您只要看一眼Renishaw的新型XL-80激光裝置和XC-80補償器,就會注意到它們比原有的ML10和EC10小了許多?,F(xiàn)在,二者總重僅3公斤多一點(包括連接電纜、電源和傳感器),比原來減輕了70%。當然,隨著激光頭和補償器尺寸減小,其他系統(tǒng)組件,例如三腳架和云臺也相應地減小以便相配,因此整個系統(tǒng)(除了三腳架)的裝運箱減小了許多?,F(xiàn)在,最小的“腳輪箱"只有原來箱子的一半大一點點,卻可以攜帶整個線性和角度測量系統(tǒng),并有放置RenishawQC10球桿儀組件的位置。這個高度便攜的“檢查和修正"系統(tǒng)總重不到15公斤,同類產(chǎn)品無以匹敵。
為了與系統(tǒng)的其他組件的便攜性相匹配,我們設計了新型三腳架和裝運箱,僅重6.2公斤。
激光頭和云臺體積很小,能夠方便地固定在標準磁性座上,可以在不方便使用三腳架固定的應用條件下使用。XL-80激光測量系統(tǒng)的光束高度和光學鏡組尺寸與ML10系統(tǒng)一樣,因此也可以直接放在花崗巖工作臺(不使用三腳架云臺)上,進行坐標測量機的校準。
Renishaw已將激光的預熱時間縮短至大約僅6分鐘。預熱速度較同類系統(tǒng)快,因此用戶等待時間減少了,用于測量工作的幾率增加了,這對于機器校準服務商和那些需要在一個地點執(zhí)行多項測量的用戶而言非常重要。
現(xiàn)在,信號增益的開啟和關閉是一項標準功能,使其具有80米線性測量距離的能力。若短距離應用時,則可以提高信號強度。激光信號通過USB連線直接輸出到電腦上(無需單獨的接口),輔助功能端口可提供模擬信號及工廠按需設定的數(shù)字信號輸出。
XL-80激光頭的配置集原ML10G/Q/X多種任選功能于一體,功能更完善。
XL-80系統(tǒng)具有長達3年標準的全面保修,并可以以優(yōu)惠的價格選購延長保修時間為5年。對于使用ML10的老用戶和使用其他廠商制造的同類系統(tǒng)的新客戶,我們均提供一些特別優(yōu)惠政策。
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